![[BORN TO BE] 5. Deposition & Ion Implantation](https://i.ytimg.com/vi/IWZ8bnI01Ps/maxresdefault.jpg)
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![[기초반도체공정|2.2] #oxidation kinetics #Deal-Grove model #oxidation 공정의 수학적 모델 #모델링은 어렵지 않아](https://i.ytimg.com/vi/TY6JiJaRvX8/maxresdefault.jpg)
0 Views · 11 Jan 2026
![[기초반도체공정|2.3] #oxidation #현재는 안쓰는 이유 #gate oxide scaling #high-k metal gate](https://i.ytimg.com/vi/kpquQEFTd-E/maxresdefault.jpg)
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0 Views · 11 Jan 2026
![[기초반도체공정|3.3] #photoresist #soft bake #alignment #PEB #develop #hard bake #PR strip](https://i.ytimg.com/vi/5Fq48YJKY2c/maxresdefault.jpg)
0 Views · 11 Jan 2026
![[기초반도체공정|4.1] #etching #etch rate #profile #isotropic #anisotropic #selectivity #bias #uniformity](https://i.ytimg.com/vi/T6H-apNTAD4/maxresdefault.jpg)
![[기초반도체공정|4.2] #wet etching #dry etching #ion milling #RIE #Bosch process](https://i.ytimg.com/vi/hh_V8Gk9Zs8/maxresdefault.jpg)
![[기초반도체공정|5.1] #doping #diffusion #ion implantation #dose #projected range #channeling #RTA](https://i.ytimg.com/vi/GnDwUsllRpI/maxresdefault.jpg)
![[기초반도체공정|5.2] #sheet resistance #four point probe #Kelvin probe #secondary ion mass spectroscopy](https://i.ytimg.com/vi/BKgPWD_J_7M/maxresdefault.jpg)
![[기초반도체공정|6.1] #deposition #evaporation #thermal #e-beam #lift-off process](https://i.ytimg.com/vi/3swdlJ9CdZM/maxresdefault.jpg)
![[기초반도체공정|6.3] #deposition #CVD #LPCVD #PECVD](https://i.ytimg.com/vi/gXJC_T8JQCA/maxresdefault.jpg)
![[기초반도체공정|6.4] #deposition #ALD](https://i.ytimg.com/vi/URsOBG0l2hw/maxresdefault.jpg)
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[기초반도체공정|6.2] #deposition #sputtering #DC #RF #reactive ion #magnetron
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11 Jan 2026
PVD 증착방식 중 sputtering 에 대해 알아 봅니다.
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