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[기초반도체공정|5.2] #sheet resistance #four point probe #Kelvin probe #secondary ion mass spectroscopy
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11 Jan 2026
도핑 프로세스의 결과를 확인하기 위한 4-point probe 측정에 대해 알아보고, sheet resistance 개념에 대해 이해해봅니다.
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