![[BORN TO BE] 5. Deposition & Ion Implantation](https://i.ytimg.com/vi/IWZ8bnI01Ps/maxresdefault.jpg)
![[기초반도체공정|0.0] #강의소개](https://i.ytimg.com/vi/PRZsD9m9JM4/maxresdefault.jpg)
![[기초반도체공정|1.1] #silicon #liquid chemical #gas](https://i.ytimg.com/vi/-CVEemHH46o/maxresdefault.jpg)
![[기초반도체공정|1.2] #vacuum #plasma](https://i.ytimg.com/vi/UF6D5r-Qyls/maxresdefault.jpg)
![[기초반도체공정|1.3] #cleanroom #contamination #사람이 제일 문제](https://i.ytimg.com/vi/Gmz0UKbH8sM/maxresdefault.jpg)
![[기초반도체공정|1.4] #RCA clean #megasonic](https://i.ytimg.com/vi/YTmsQcnxUXk/maxresdefault.jpg)
![[기초반도체공정|2.1] #oxidation #gate insulator #SiO2 #dangling bond #forming gas annealing](https://i.ytimg.com/vi/a4EkoGerI0Q/maxresdefault.jpg)
![[기초반도체공정|2.2] #oxidation kinetics #Deal-Grove model #oxidation 공정의 수학적 모델 #모델링은 어렵지 않아](https://i.ytimg.com/vi/TY6JiJaRvX8/maxresdefault.jpg)
![[기초반도체공정|2.3] #oxidation #현재는 안쓰는 이유 #gate oxide scaling #high-k metal gate](https://i.ytimg.com/vi/kpquQEFTd-E/maxresdefault.jpg)
![[기초반도체공정|3.1] #photolithography #전체 공정 요약](https://i.ytimg.com/vi/Csr33IuUIwk/maxresdefault.jpg)
![[기초반도체공정|3.2] #photolithography #light source #resolution #critical dimension #DOF](https://i.ytimg.com/vi/BnjT_Nr_Jvo/maxresdefault.jpg)
![[기초반도체공정|3.3] #photoresist #soft bake #alignment #PEB #develop #hard bake #PR strip](https://i.ytimg.com/vi/5Fq48YJKY2c/maxresdefault.jpg)
![[기초반도체공정|4.1] #etching #etch rate #profile #isotropic #anisotropic #selectivity #bias #uniformity](https://i.ytimg.com/vi/T6H-apNTAD4/maxresdefault.jpg)
![[기초반도체공정|4.2] #wet etching #dry etching #ion milling #RIE #Bosch process](https://i.ytimg.com/vi/hh_V8Gk9Zs8/maxresdefault.jpg)
![[기초반도체공정|5.1] #doping #diffusion #ion implantation #dose #projected range #channeling #RTA](https://i.ytimg.com/vi/GnDwUsllRpI/maxresdefault.jpg)
![[기초반도체공정|5.2] #sheet resistance #four point probe #Kelvin probe #secondary ion mass spectroscopy](https://i.ytimg.com/vi/BKgPWD_J_7M/maxresdefault.jpg)
![[기초반도체공정|6.1] #deposition #evaporation #thermal #e-beam #lift-off process](https://i.ytimg.com/vi/3swdlJ9CdZM/maxresdefault.jpg)
![[기초반도체공정|6.2] #deposition #sputtering #DC #RF #reactive ion #magnetron](https://i.ytimg.com/vi/Ozp_6kHgzB8/maxresdefault.jpg)
![[기초반도체공정|6.3] #deposition #CVD #LPCVD #PECVD](https://i.ytimg.com/vi/gXJC_T8JQCA/maxresdefault.jpg)
![[기초반도체공정|7.1] #metallization #interconnection #junction spike #electromigration #Damascene](https://i.ytimg.com/vi/gfcE3lQDLFk/maxresdefault.jpg)
[기초반도체공정|6.4] #deposition #ALD
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11 Jan 2026
ALD(atomic layer deposition) 증착 방식에 대해 알아봅니다.
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