![[BORN TO BE] 2. Oxidation](https://i.ytimg.com/vi/5HHwZN-Y6U4/maxresdefault.jpg)
![[반도체 공정] 1. 산화 (Oxidation)](https://i.ytimg.com/vi/dHavexFfT6k/maxresdefault.jpg)
![[기초반도체공정|0.0] #강의소개](https://i.ytimg.com/vi/PRZsD9m9JM4/maxresdefault.jpg)
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![[기초반도체공정|1.4] #RCA clean #megasonic](https://i.ytimg.com/vi/YTmsQcnxUXk/maxresdefault.jpg)
![[기초반도체공정|2.1] #oxidation #gate insulator #SiO2 #dangling bond #forming gas annealing](https://i.ytimg.com/vi/a4EkoGerI0Q/maxresdefault.jpg)
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![[기초반도체공정|2.3] #oxidation #현재는 안쓰는 이유 #gate oxide scaling #high-k metal gate](https://i.ytimg.com/vi/kpquQEFTd-E/maxresdefault.jpg)
![[기초반도체공정|3.1] #photolithography #전체 공정 요약](https://i.ytimg.com/vi/Csr33IuUIwk/maxresdefault.jpg)
![[기초반도체공정|3.2] #photolithography #light source #resolution #critical dimension #DOF](https://i.ytimg.com/vi/BnjT_Nr_Jvo/maxresdefault.jpg)
0 Views · 11 Jan 2026
![[기초반도체공정|3.3] #photoresist #soft bake #alignment #PEB #develop #hard bake #PR strip](https://i.ytimg.com/vi/5Fq48YJKY2c/maxresdefault.jpg)
0 Views · 11 Jan 2026
![[기초반도체공정|4.1] #etching #etch rate #profile #isotropic #anisotropic #selectivity #bias #uniformity](https://i.ytimg.com/vi/T6H-apNTAD4/maxresdefault.jpg)
![[기초반도체공정|4.2] #wet etching #dry etching #ion milling #RIE #Bosch process](https://i.ytimg.com/vi/hh_V8Gk9Zs8/maxresdefault.jpg)
![[기초반도체공정|5.1] #doping #diffusion #ion implantation #dose #projected range #channeling #RTA](https://i.ytimg.com/vi/GnDwUsllRpI/maxresdefault.jpg)
![[기초반도체공정|5.2] #sheet resistance #four point probe #Kelvin probe #secondary ion mass spectroscopy](https://i.ytimg.com/vi/BKgPWD_J_7M/maxresdefault.jpg)
![[기초반도체공정|6.1] #deposition #evaporation #thermal #e-beam #lift-off process](https://i.ytimg.com/vi/3swdlJ9CdZM/maxresdefault.jpg)
![[기초반도체공정|6.2] #deposition #sputtering #DC #RF #reactive ion #magnetron](https://i.ytimg.com/vi/Ozp_6kHgzB8/maxresdefault.jpg)
[기초반도체공정|2.2] #oxidation kinetics #Deal-Grove model #oxidation 공정의 수학적 모델 #모델링은 어렵지 않아
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11 Jan 2026
oxidation 과정을 수학적으로 기술한 모델인 Deal-Grove model 을 유도해보고, oxidation 공정에 미치는 여러 요인들을 이해해봅니다.
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